UA3P 3D Profilometer
The Panasonic Connect UA3P profilometer series is designed to measure aspherical lenses & molds, semiconductor wafers, and any other precision component requiring nanometer level accuracy ranging up to 200mm x 200mm. Different machine models are available to meet your optical & high aspect ratio metrology needs.
The UA3P-300, UA3P-4 and UA3P-5 all offer users the accuracy of AFM technology with the measurement range of a CMM. Our unique approach uses atomic force probe technology in the stylus and HeNe laser-based interferometric XYZ axis positioning.
Couple this technology with a solid granite-base and you have a robust metrology system that can be used on the factory floor and still deliver 0.1um level total uncertainty.
- The UA3P can measure aspherical lenses and free-form mirrors and their molds, which are essential for digital consumer electronics such as mobile phones, DSCs, DVDs, and Blu-ray recorders, as well as in home security, optical communications, and vehicle H
- Ultra-accurate measurement in only 3 minutes
- Automatic NC program generation
- Extensive library of optional software
- Easy operation supports rapid feedback to machining
Featured Specs
SKU | UA3P-300/UA3P-4/UA3P-5 |
---|---|
Model ID | UA3P-300 |
Outer Dimensions (W x D x H) mm | 700 x 780 x 1,500 |
Mass of Main Body | 700 kg (Others: 150 kg) |
Measuring Range (X, Y, Z axes) mm | 30x30x20 |
Measured Object Placement Area (X, Y, Z axes) mm | 100x100x100 |
Measuring Probe | AFP |
Resolution | 0.3nm |
Max. Inclination Angle for Top-Surface Measurement | 75º |
Measurement Accuracy with Top-Surface Probe | 30° max.: ±0.05 µm (round trip) 45° max.: ±0.08 µm (round trip) 60° max.: ±0.15 µm (round trip) 70° max.: ±0.15 µm (back) *When using the standard ruby stylus or ceramic stylus |
Measurement Accuracy by Coordinate Axis (XY axis measurement accuracy) | 100 mm max.: 0.05 µm (Repeatability 0.05 µm max. ) 200 mm max.: 0.1 µm (Repeatability 0.05 µm max.) |
Measurement Speed | 0.005-5 mm/sec |
Operating Environment Temperature | 20-23°C (Variation ±1°C max.) |
Operating Environment Humidity | 20-60% (Wind from air conditioners should not directly blow onto the equipment) |
Operating Environment Vibration | Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2 |
Air Pressure Source | 0.5 MPa - 1.0 MPa Flow rate 150 NL/min |
Standard Accessories | Standard ruby stylus, standard diamond stylus, AFP (Model 300: 1 pc., Models 4 and 5: 2 pcs. each), standard ball for calibration, printer |